What is the name for CBr4?

Question

What is the name for CBr4?

Answer 1

Gas CBr4 Source

Low-Temperature Gas Source

Veeco's Low-Temperature Gas Source provides a low-cost means to introduce gas without thermal pre-cracking.

It features a large conductance tube for fast gas switching, and a diffuser end plate for good uniformity. A band heater, external to the vacuum, heats the source to a temperature range (<200°C) sufficient to prevent condensation of the gas in the tube, yet not too low to promote cracking.

Technical Data

Nitride Growth

Successful growth of GaN and related materials by MBE has been achieved using a variety of nitrogen sources. While RF plasma and ECR sources are commonly used to activate N2, interest has turned to NH3 as a source gas. NH3 is cracked at the heated substrate surface and requires a heated gas injector to prevent condensation in the inlet tube.

Carbon Doping

Carbon is often a preferable p-type dopant, used to replace beryllium or zinc in GaAs material systems, due to its low effusion coefficient. Solid carbon sources provide useful doping into the mid-1019cm-3 range. CBr4 is much more versatile - a solid with an appreciable vapor pressure (approx. 3 Torr) at room temperature.1 CBr4 is an excellent choice as it is easily introduced into the MBE system via a leak valve, does not exhibit long-term memory effects, and is highly efficient - permitting doping densities into the 1020cm-3 range with no evidence of any Br incorporation. CBr4 is cracked at the heated substrate surface, eliminating the need for any thermal pre-cracking in the gas injector. A complete CBr4 gas-handling system is also available.

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