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What are the best universities to pursue M.S and PhD in Sensors and micro systems(MEMS) in Germany?

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What are the best universities to pursue M.S and PhD in Sensors and micro systems(MEMS) in Germany?

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  1. Try these links:

    http://hpwren.ucsd.edu/news/20070921/

    http://ewh.ieee.org/tc/sensors/Sensors20...

    http://www.mesago.de/en/SSI/Speakers_+_P...

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